With ToolStation, the interfaces between the user, the process equipment and the Manufacturing Execution System (MES) are already pre-integrated, significantly reducing the time, cost and risk of equipment automation. Also, the unique integration requirements of fab equipment are implemented faster and at lower cost because ToolStation uses an object-oriented architecture that adheres to industry-standard protocols.
ToolStation uses iMaven's fab-wide GUI to provide a common user interface for process equipment control and MES/user interaction. The fab-wide GUI reduces data entry time, displays real-time equipment and wafer-lot status, and guides operators through process steps to increase equipment utilization and ensure accurate processing. By providing a common GUI for equipment and MES functions, ToolStation also improves operator productivity and reduces training time.
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